- Input voltage：380V
- Output power：10KW
- Output voltage(Max)：10KV
- Output current(Max)：1.5A
- Output frequency：25KHz
Specification:
|
Product Name |
Midfrequency plasma power supply |
|
|
Items No. |
WZP10-6KV |
|
|
Input Voltage |
AC380±10%V |
|
|
Output |
Power |
10kw |
|
Current |
1.6A |
|
|
Voltage |
6KV, maximum 10KV |
|
|
Frequency |
25khz |
|
|
Waveform |
Quasi-sine-wave |
|
|
Mode |
Custom constant voltage, constant current, constant power |
|
|
Accuracy of adjustment |
≤1% |
|
|
Efficiency |
≥90% |
|
|
Power Factor |
cosΦ≥0.9 |
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|
Power Switching |
DB9 pin connector |
|
|
Temperature |
-10~+40℃ |
|
|
Humidity |
≤85% |
|
|
Cooling mode |
Air-cooling |
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|
Dimensions |
480*135*380(mm) |
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|
Fields |
plasma cleaning, etching, plasma plating, plasma coating, plasma ashing and surface modification. |
|
Application:
Integrated circuit, semiconductor and microelectronics, electronics industry, electronic industry, textile industry, vacuum auto industry, aerospace, bio engineering, medicine, solar panels, plastic, rubber, archaeological research and development.
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